psc Plasma Coating


Plasma coated chamber parts for semiconductor and LCD industries


- Dense film and High adhesion coating.

- Prevent impurities from contaminating sprayed film by executing spraying work in clean room.

- Ultra smooth surface polishing technology for sprayed film.




psc process






ceramic  Fine Ceramic Parts

oring  Perfluoroelastomer Seals

pin  Precision Vaccum Chucks

esc  Refurbished/Recycled Parts

psc  Plasma Coating

quartz  Quartz and Others Parts

wc  Tungsten Carbide Blades

for  Heat resistan phosphor plate PhosCera®