熔射覆膜, 再生製造精密零組件. 應用於半導體產業, 平面顯示器產業.

Using ultra cleaning process via physical and chemical methods to recycle the chamber parts under customer’s co-work contracts. The parts been contaminated during wafer or panel manufacturing processes under the condition of etching, plasma, chemical and ion-implantation could be recycled by cautious control of ultra cleaning process.

Using fine-chemical & micro-physical refurbishing methods to recover the precious chamber parts under customer’s co-work contracts. The function could be reset and recovered by cautious control of the refurbishing process.

再生製造與維修校正製程設備中之貴重精密零組件

 

再生回收清洗維修製程設備中之消耗性零組件

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