Refurbishment , plasma coated & recycle products for semiconductor and flat display panel industries

Using ultra cleaning process via physical and chemical methods to recycle the chamber parts under customer’s co-work contracts. The parts been contaminated during wafer or panel manufacturing processes under the condition of etching, plasma, chemical and ion-implantation could be recycled by cautious control of ultra cleaning process.

Using fine-chemical & micro-physical refurbishing methods to recover the precious chamber parts under customer’s co-work contracts. The function could be reset and recovered by cautious control of the refurbishing process.

Refurbish chamber parts for semiconductor & LCD industries

 

Recycle chamber parts for semiconductor & LCD industries

 

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