Refurbishment, plasma coated & recycle products for semiconductor and flat display panel industries

Used ESC


- failed due to He leakage


Our repaired ESC


- Flat surface



Stabilize He Leakage Condition

[example A]

[example B]

Used stepper chuck


- failed due to de-focus




Our repaired stepper chuck


- Flat surface pin to pin


Contract based      we accept contract based order to do refurbishment on high precious chamber parts under customer’s co-work . 

Global No.1 semiconductor equipment  maker & global No.1 IC foundry qualified & using products

Before repair

After repair

Before repair

After repair

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