Refurbishment, plasma coated & recycle products for semiconductor and flat display panel industries

Used ESC

 

- failed due to He leakage

 

Our repaired ESC

 

- Flat surface

 

 

Stabilize He Leakage Condition

[example A]

[example B]

Used stepper chuck

 

- failed due to de-focus

 

 

 

Our repaired stepper chuck

 

- Flat surface pin to pin

 

Contract based      we accept contract based order to do refurbishment on high precious chamber parts under customer’s co-work . 

Global No.1 semiconductor equipment  maker & global No.1 IC foundry qualified & using products

Before repair

After repair

Before repair

After repair

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