熔射覆膜, 再生制造精密零组件. 应用于半导体产业, 平面显示器产业.

Using ultra cleaning process via physical and chemical methods to recycle the chamber parts under customer’s co-work contracts. The parts been contaminated during wafer or panel manufacturing processes under the condition of etching, plasma, chemical and ion-implantation could be recycled by cautious control of ultra cleaning process.

Using fine-chemical & micro-physical refurbishing methods to recover the precious chamber parts under customer’s co-work contracts. The function could be reset and recovered by cautious control of the refurbishing process.

再生制造与维修校正制程设备中之贵重精密零组件

 

再生回收与清洗维修制程设备中之消耗性零组件

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