pin chuck


mark  Precision Vaccum Chucks


Applied for for semiconductor lithography equipment


- High precision: flatness of 0.2 μm with L/F of not more than 0.05 μm

- Shape control: adjustable chuck shapes in accordance with the shapes of wafers (unevenness control)

- Absorption responsiveness: customized planar design following specifications

- Quantitative and Qualitative Analysis: Yeedex(RSM)


p s


up down


no no leak




ceramic  Fine Ceramic Parts

oring  Perfluoroelastomer Seals

pin  Precision Vaccum Chucks

esc  Refurbished/Recycled Parts

psc  Plasma Coating

quartz  Quartz and Others Parts

wc  Tungsten Carbide Blades

for  Heat resistan phosphor plate PhosCera®