mark  Refurbished/Recycled Parts


Refurbish and repair precious parts such as ESC, heaters, vaccum chuck, ceramic coating, anodizing,....,etc. for semcionductor equipment.

r1 r2

r3 r4


esc r esc


pin p r




ceramic  Fine Ceramic Parts

oring  Perfluoroelastomer Seals

pin  Precision Vaccum Chucks

esc  Refurbished/Recycled Parts

psc  Plasma Coating

quartz  Quartz and Others Parts

wc  Tungsten Carbide Blades

for  Heat resistan phosphor plate PhosCera®